JPS637655B2 - - Google Patents
Info
- Publication number
- JPS637655B2 JPS637655B2 JP56026916A JP2691681A JPS637655B2 JP S637655 B2 JPS637655 B2 JP S637655B2 JP 56026916 A JP56026916 A JP 56026916A JP 2691681 A JP2691681 A JP 2691681A JP S637655 B2 JPS637655 B2 JP S637655B2
- Authority
- JP
- Japan
- Prior art keywords
- particle
- magnetic field
- energy
- detector
- particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002245 particle Substances 0.000 claims description 75
- 230000007935 neutral effect Effects 0.000 claims description 15
- 238000001514 detection method Methods 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000009434 installation Methods 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 238000004347 surface barrier Methods 0.000 claims description 2
- 230000004907 flux Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 230000005686 electrostatic field Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measurement Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56026916A JPS57143256A (en) | 1981-02-27 | 1981-02-27 | Neutral particle detecting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56026916A JPS57143256A (en) | 1981-02-27 | 1981-02-27 | Neutral particle detecting device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57143256A JPS57143256A (en) | 1982-09-04 |
| JPS637655B2 true JPS637655B2 (en]) | 1988-02-17 |
Family
ID=12206517
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56026916A Granted JPS57143256A (en) | 1981-02-27 | 1981-02-27 | Neutral particle detecting device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57143256A (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0611384U (ja) * | 1992-07-15 | 1994-02-10 | 旭光学工業株式会社 | カバー取付機構 |
-
1981
- 1981-02-27 JP JP56026916A patent/JPS57143256A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0611384U (ja) * | 1992-07-15 | 1994-02-10 | 旭光学工業株式会社 | カバー取付機構 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57143256A (en) | 1982-09-04 |
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